
Wafer Processing System
4″ (100mm) Wafer Fab System
1 micron processes
Can be included:
- Diffusion furnace, 3 tube (custom gas cabinet [quoted separately)
- PVD Electron beam evaporator with 4 pocket gun
- Table top RIE (Reactive Ion Etcher)
- Programmable photo resist spinner
- 4″ mask aligner, 1 micron resolution [shown in foto]
- 400x microscope with dark field
- One (1) 4 foot polypropylene wet station with hotplate
- One (1) 6 foot polypropylene wet station with hotplate
- Profilometer
- Plasma asher
- High resolution probe station with 2 probes
- Spin rinser dryer
- Wire bonder
- Die bonder
- Die shear/pull tester
- High temperature vacuum oven (400c for wafers)
- Vapor prime oven
Hepafilter oven
Well suited for University Nanolab or R&D facilities
All machines listed above will be refurbished, fully operational condition
All items Come with 30 Days Warranty
Allow 8-12 weeks for delivery
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