4″  (100mm)  Wafer Fab System
1 micron  processes

Can be included:

• Diffusion furnace, 3 tube (custom gas cabinet [quoted separately)
• PVD Electron beam evaporator with 4 pocket gun
• Table top RIE (Reactive Ion Etcher)
• Programmable photo resist spinner
• 4″ mask aligner, 1 micron resolution   [shown in foto]
• 400x microscope with dark field
• One (1) 4 foot polypropylene wet station with hotplate
• One (1) 6 foot polypropylene wet station with hotplate
• Profilometer
• Plasma asher
• High resolution probe station with 2 probes
• Spin rinser dryer
• Wire bonder
• Die bonder
• Die shear/pull tester
• High temperature vacuum oven (400c for wafers)
• Vapor prime oven

Hepafilter oven

Well suited for University Nanolab or R&D facilities

All machines listed above will be refurbished, fully operational condition

All items Come with 30 Days Warranty

Allow 8-12 weeks for delivery

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