• call: 619.985.9390
  • email: madison @ karenmadison.com
Plasmatherm SLR 720 PECVD – RIE – Reactive Ion Etch Deposition System

Plasmatherm SLR 720 PECVD – RIE – Reactive Ion Etch Deposition System

Plasmatherm SLR 720 PECVD / RIE

Stand alone Dual Chamber 720/720 Deposition & Etch system
PC controlled–Windows™ based system
Plasmatherm 700 Aluminum body chamber
Load Lock Version with (2) two process modules
One PECVD
One RIE (Reactive Ion Etch)
Main body of system
(shared components between the two chambers) includes:
Stainless Steel Skins
Windows based PC controls
Advanced Energy RFPP – RF5S power supply (500W – 13.56MHz)
Advanced Energy AM5 matching network w/tuner
Leybold D25 or equivalent Load Lock pump
Neslab HX 75 chiller with RS232 interface to system
Electrical Disconnect box – 208V /  3 Ph /  60A
Flat panel display with keyboard & mouse
Full set of manuals


PECVD Module includes:

Heated Chuck
Watlow controller
11” chuck with center lift type

Optical Windows for Endpoint Control & diagnostics

Leybold D40 with 151 blower (min.) Mechanical Pump
MKS 290 Ion Gauge controller and Ion gauge
MKS TC gauge controller
1 or 2 Torr Baratron
4 gas MFC’s
RIE module includes:
Lower electrode

11” showerhead
11” chuck – center lift type
Optical Windows for Endpoint Control & diagnostics
Soffie Class III Laser endpoint detector
MKS 153 Throttle valve
Leybold 361C Turbo Pump
Leybold 150/360 NT Turbo Controller
Leybold D40BCS Mechanical Roughing Pump
500mT Baratron
4 gas MFC’s

Gas Manifolds and Gas line fabrication and installation service were
fabricated and installed (4) additional gas sticks/lines
including Nupro Valves (with bypass valves included).

Unions, Glands, VCR fittings, MFCs and Gas Manifolds
to serve the existing Plasmatherm Dual Chamber

PECVD/RIE System as listed below:

(2) – 4 port manifolds
(2) – gas sticks for Nitrogen and Argon
to include Nupro Valve, MFC and “L” leg to gas connection
(2) – gas sticks with bypass (highly recommended for Cl2 and BCl3)
to include 3 Nupro Valves and MFC
2 – 4 channel valve control PCB (for the nupro valves)
1/8″ tubing for the Nupro Valves (~40 ft) • Re-wiring of the valve control PCB connectors to support this up-fit, plugs, pins and wire as necessary

*JVIC* will need to move the N2 purge inlet connection to its new location

(to support the addition of the 4 port manifold)

MFCs will need to be cleaned and calibrated
to Nitrogen for the following flow rates:

(2) for the PECVD side of the system
Nitrogen – 2000 SCCM
Argon – 500 SCCM
(2) for the RIE side of the system
BCL3 – 50 SCCM
Cl2 – 50 SCCM



    KARENMADISON.COM thanks for stopping by
    karenmadison.com