WAFER PROCESS EQUIPMENT

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<Wafer Process Equipment>

INVENTORY NUMBER DESCRIPTION

10643 Wafer Cleaner Micro Automation 2006

11574 Wafer Cleaner Micro Automation 2006

12826 Wafer Cleaner Micro Automation 2006

13793 Wafer Cleaner Micro Automation 2006 5" Wafer Cleaning Station
110/220V 50/60Hz

12123 Wafer Cleaner Micro Automation 2010 S/N: 213

10142 Wafer Develop Station Mactronix Ultratech PLU-400
S/N: 911202P390 & P391
11076 Wafer Dryer SSEC

12553 Wafer Etcher SSEC EverGreen 202 Series II
         S/N: 2223, Mfg: 7/00    220V 20A
             For 3", 4" & 5" Wafers
                 with CSU'S S/N: 2223 & S/N: 2222

13388 Wafer Inspection System KLA 1200 S/N: 8W3923 200mm

13389 Wafer Inspection System KLA 1200

12116 Wafer Mounter   K&S #382-J S/N: 4240
                                        6" with Video Aligner
                                                    110/240V 50/60Hz

13873 Wafer Mounter Micro Automation S/N: 303

12378 Wafer Mounter/Taper ESEC WM650 S/N: 2-9
220V 0.5A 50/60Hz

12738 Wafer Mounter/Taper ESEC WM650 S/N: 4-16
220V 10A 50/60Hz With Camera System

12023 Wafer Rinser-Dryer Semitool Double Stack

13136 Wafer Rinser Dryer SEMITOOL

13366 Wafer Rinser Dryer VERTEQ Super Clean 1600
                        Two of these S/N: 8854 & S/N: 8853
                          150mm   Double Stack with Process and Resistivity Controller

12592 Wafer/Mask Rinser Cleaner SSEC 1756   S/N: 1736
                                    220V 15A 1Ph 50/60Hz

12607 Wafer/Mask Rinser Cleaner UltraTech PC602 S/N 8841103
High Pressure Spin Cleaner

13974 Wafer/Mask Rinser Cleaner ULTRATECH 603 5"
High Pressure Spin Cleaner

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